The Microelectromechanical Systems (MEMS) Laboratory, located in the Mechanical Engineering Department at University of Akron, is a facility for design, analysis, modeling, fabrication, and characterization of MEMS devices. The lab was built in spring 2004 and contains about 1000 square feet of cumulative lab space.
The lab is equipped with two chemical exhaust hoods, and three class 100 laminar flow hoods. It is capable of performing photolithography, spin coating and wet etching. Available in the lab for MEMS fabrication are an OAI 206 UV mask aligner, a Laurell WS-400B-6NPP/LITE spin-coater, a Branson 3510 ultrasonic agitator, a Delta press drill for plastic and glass drilling, and a Delta band saw for plastic and soft metal cutting. Two homebuilt wet benches are housed in one modified class 1000 exhaustive hood. Class 100 laminar flow hoods with soft walls are equipped to house the mask aligner and spin coater.
Available in the lab for MEMS testing and characterization are a Signatone S-1160 Probe station, a Mitutoyo FS70 high precision microscope, a Panasonic WV-CP454 CCD camera, HAMEG 800HZ oscilloscope, Tektronix 200HZ digital oscilloscopes, HP 1650A logic analyzer, HP 5335A frequency counter, Wavetek and HP signal generators, Elenco and EC-3000P power supplies. The probe station is connected for instrument control and video frame grabbing. Available for optical MEMS testing include one Newport I-2000 series vibration isolation table, a homebuilt standard Michelson Interferometer for small displacement measurement, a homebuilt optical diffractive measurement setup for dynamic displacement measurement, a homemade multi-channel drive electronic board for electrostatic and PZT actuator array, a JDSU-1125 laser beam generator, a Thorlab photodetector, and a Spectra-Physics 35W laser source. Available in the lab for data acquisition are a National Instruments Labview-based computer-controlled experiment automation system and two homebuilt Farady cages.